Kev Ua Haujlwm Nto thiab Kev Ua Haujlwm Zoo ntawm Dawb Fused Alumina Micropowder
Thaum nws los txog rau kev sib tsoo thiab polishing, cov kws txawj ua haujlwm paub dhau los ib txwm hais tias, "Tus kws txawj ua haujlwm yuav tsum xub ua kom nws cov cuab yeej ntse." Hauv ntiaj teb ntawm kev ua haujlwm precision,dawb fused alumina micropowder yog ib lub "muaj zog me me." Tsis txhob saib tsis taus cov khoom me me zoo li plua plav no; nyob rau hauv lub tshuab microscope, lawv ua lub luag haujlwm tseem ceeb hauv kev txiav txim siab seb qhov workpiece thaum kawg ua tiav qhov ci "zoo li daim iav" lossis tsis ua raws li qhov xav tau. Niaj hnub no, cia peb tham txog cov ntsiab lus tseem ceeb ntawm kev sib raug zoo ntawm "kev ua haujlwm ntawm qhov chaw" ntawm cov hmoov av dawb fused alumina thiab nws cov txheej txheem ua haujlwm zoo.
I. Dawb Fused Alumina Micropowder: Ntau Tshaj Li "Nyuaj" Xwb
Dawb fused alumina, feem ntau yog tsim los ntawmα-alumina, paub txog nws qhov nyuaj siab thiab zoo toughness. Txawm li cas los xij, thaum nws ua rau hauv micropowder, tshwj xeeb tshaj yog cov khoom nrog cov khoom me me ntsuas hauv micrometers lossis txawm tias nanometers, nws lub ntiaj teb dhau los ua ntau dua. Ntawm lub sijhawm no, kev ntsuam xyuas nws qhov kev siv tau xav tau ntau dua li tsuas yog saib qhov nyuaj; nws "kev ua haujlwm ntawm qhov chaw" yog qhov tseem ceeb.
Kev ua haujlwm ntawm qhov chaw yog dab tsi? Koj tuaj yeem nkag siab nws li no: Xav txog ib pawg hmoov me me. Yog tias txhua lub khoom me me zoo li lub pob me me, "zoo siab" rau ib leeg, ces lawv txoj kev sib cuam tshuam nrog qhov chaw ua haujlwm thiab cov kua sib tsoo tsis yog "ua haujlwm," thiab lawv txoj haujlwm qeeb qeeb. Tab sis yog tias cov khoom me me no muaj "ntug" lossis nqa qee yam "khoom siv them" lossis "pawg tshuaj lom neeg," ces lawv dhau los ua "ua haujlwm," yooj yim dua "tuav" qhov chaw ua haujlwm, thiab txaus siab rau kev sib kis sib npaug hauv cov kua, es tsis txhob sib sau ua ke thiab qeeb. Qib kev ua haujlwm no hauv qhov chaw lub cev thiab tshuaj lom neeg yog nws qhov kev ua haujlwm ntawm qhov chaw.
Qhov kev ua ub no los qhov twg los? Ua ntej, cov txheej txheem pulverization thiab kev faib tawm yog "shapers." Mechanical pulverization yooj yim tsim cov nplaim tawg tshiab, muaj zog siab, ua rau muaj kev ua ub no siab tab sis muaj peev xwm faib cov khoom me me dav; cov nplaim uas npaj los ntawm cov txheej txheem tshuaj lom neeg yuav "ntshiab dua" thiab sib xws dua. Qhov thib ob, thaj chaw tshwj xeeb yog qhov qhia tseem ceeb - cov khoom me me, qhov loj dua "cheeb tsam sib ntaus sib tua" uas tuaj yeem tiv tauj cov khoom ua haujlwm rau tib qhov hnyav. Qhov tseem ceeb tshaj, xav txog qhov xwm txheej ntawm qhov chaw: Puas yog nws lub kaum sab xis thiab tsis zoo (nrog ntau qhov chaw ua haujlwm), lossis puag ncig (ntau dua hnav-resistant tab sis muaj peev xwm nrog txo qis kev txiav zog)? Puas yog qhov chaw hydrophilic lossis oleophilic? Nws puas tau dhau los ua "kev hloov kho qhov chaw tshwj xeeb," xws li txheej nrog silica lossis lwm yam neeg sawv cev txuas kom hloov nws cov khoom?
II. Kev Ua Si Ntau Puas Yog "Kho Txhua Yam"? Kev Seev Cev Nyuaj Nrog Kev Ua Haujlwm Zoo
Nyob rau hauv kev xav, qhov kev ua haujlwm ntawm qhov chaw siab dua yuav tsum txhais tau tias muaj zog dua thiab ua haujlwm tau zoo dua. Hauv ntau qhov xwm txheej, qhov no yog qhov tseeb. Cov hmoov me me uas ua haujlwm tau zoo, vim lawv lub zog ntawm qhov chaw siab thiab muaj peev xwm nqus tau zoo, tuaj yeem "nplaum" lossis "muab tso rau hauv" qhov chaw ua haujlwm thiab cov cuab yeej sib tsoo (xws li cov ntaub so tes), ua tiav kev txiav me me thiab sib xws. Tshwj xeeb tshaj yog nyob rau hauv cov txheej txheem raug xws li kev siv tshuaj lom neeg (CMP), qhov chaw hmoov me me thiab qhov chaw ua haujlwm (xws li silicon wafer) tuaj yeem dhau los ua qhov tshuaj lom neeg tsis muaj zog, ua rau qhov chaw ua haujlwm mos, uas, ua ke nrog kev ua haujlwm, tshem tawm, ua tiav "1 + 1> 2" ultra-smooth effect. Hauv qhov no, kev ua haujlwm ua lub zog ua rau muaj kev ua haujlwm zoo.
Txawm li cas los xij, tej yam tsis yooj yim li ntawd. Kev ua haujlwm saum npoo av yog rab ntaj ob sab.
Ua ntej, kev ua haujlwm ntau dhau ua rau muaj kev sib sau ua ke ntawm cov khoom me me, ua rau muaj cov khoom me me lossis cov khoom loj dua. Xav txog qhov no: qhov uas yog ib qho kev siv zog ntawm tus kheej tam sim no tau sib sau ua ke, txo cov khoom me me uas txiav tau zoo. Cov pawg loj no kuj tseem tuaj yeem ua rau muaj qhov khawb tob rau ntawm qhov chaw ua haujlwm, txo qhov zoo thiab kev ua haujlwm zoo. Nws zoo li ib pawg neeg ua haujlwm uas muaj lub siab xav ua haujlwm tab sis tsis koom tes ua ke, cuam tshuam ib leeg.
Qhov thib ob, hauv qee qhov kev siv ua haujlwm, xws li kev sib tsoo ntxhib lossis kev txiav cov khoom tawv thiab tawg yooj yim, peb yuav xav tau cov khoom me me kom "ntse ruaj khov." Kev ua haujlwm ntau dhau ntawm qhov chaw tuaj yeem ua rau cov khoom me me tawg thiab hnav ua ntej lub sijhawm thaum pib cuam tshuam. Txawm hais tias lub zog txiav thawj zaug yuav muaj zog, qhov ruaj khov tsis zoo, thiab qhov nrawm ntawm kev tshem tawm cov khoom yuav txo qis. Hauv cov xwm txheej zoo li no, cov khoom me me uas muaj qhov chaw ruaj khov dua tom qab kev kho mob passivation tsim nyog, vim lawv cov npoo thiab qhov tawv, yuav muab kev ua haujlwm zoo dua.
Tsis tas li ntawd xwb, kev ua haujlwm zoo yog qhov qhia tau ntau yam: kev tshem tawm cov khoom siv, qhov roughness ntawm qhov chaw, qhov tob ntawm cov txheej puas tsuaj hauv qab, kev ruaj khov ntawm cov txheej txheem, thiab lwm yam. Cov hmoov me me uas ua haujlwm ntau yuav muaj qhov zoo dua hauv kev ua tiav qhov roughness ntawm qhov chaw qis heev (zoo), tab sis kom ua tiav qhov zoo no, qee zaum nws yuav tsum txo qhov siab lossis qhov ceev, txo qee qhov kev tshem tawm. Yuav ua li cas kom muaj kev sib npaug nyob ntawm qhov yuav tsum tau ua tiav.
III. "Txoj Kev Tsim Kho Kom Haum": Nrhiav Qhov Sib Npaug Zoo Tshaj Plaws hauv Daim Ntawv Thov
Yog li ntawd, kev sib tham txog qhov zoo ntawm kev ua haujlwm siab lossis qis ntawm qhov chaw yam tsis xav txog qhov xwm txheej tshwj xeeb ntawm daim ntawv thov tsis muaj txiaj ntsig. Hauv kev tsim khoom tiag tiag, peb tab tom xaiv "cov yam ntxwv ntawm qhov chaw" uas tsim nyog tshaj plaws rau "kev ua haujlwm tshwj xeeb."
Rau kev txhuam kom meej heev (xws li cov iav tsom iav thiab cov wafers semiconductor): lub hom phiaj yog qhov chaw zoo meej ntawm qhov ntsuas atomic. Hauv qhov no, cov hmoov me me uas muaj zog heev nrog kev faib tawm meej, kev faib tawm me me ntawm cov khoom me me, thiab cov chaw hloov kho kom zoo (xws li silica sol encapsulation) feem ntau raug xaiv. Lawv qhov kev sib kis siab thiab kev sib cuam tshuam tshuaj lom neeg nrog cov slurry polishing yog qhov tseem ceeb. Ntawm no, kev ua haujlwm feem ntau ua haujlwm "qhov zoo tshaj plaws," thaum kev ua haujlwm zoo tshaj plaws los ntawm kev tswj hwm cov txheej txheem kom meej.
Rau cov khoom siv abrasives ib txwm muaj, cov khoom siv abrasives siv, thiab cov hmoov micronized siv rau hauv cov log sib tsoo: Kev ua haujlwm txiav ruaj khov thiab cov khoom ua kom ntse yog qhov tseem ceeb. Cov hmoov micronized yuav tsum muaj peev xwm tawg hauv qab qee qhov kev nyuaj siab, ua rau pom cov npoo ntse tshiab. Nyob rau theem no, kev ua haujlwm ntawm qhov chaw yuav tsum tsis txhob siab dhau kom tsis txhob muaj kev sib sau ua ke ua ntej lossis kev ua haujlwm ntau dhau. Los ntawm kev tswj cov khoom siv raw kom huv si thiab cov txheej txheem sintering, kev tau txais cov hmoov micronized nrog cov qauv microstructure tsim nyog (muaj lub zog sib koom ua ke es tsis yog tsuas yog nrhiav lub zog siab ntawm qhov chaw) feem ntau ua rau muaj kev ua haujlwm zoo dua.
Rau cov ntawv thov uas tab tom tsim tawm thiab cov slurry: Qhov ruaj khov ntawm cov hmoov micronized yog qhov tseem ceeb heev. Kev hloov kho qhov chaw (xws li kev sib txuas cov polymers tshwj xeeb lossis kho qhov zeta potential) yuav tsum tau siv los muab cov steric hindrance lossis electrostatic repulsion txaus, cia nws nyob twj ywm rau lub sijhawm ntev txawm tias nyob hauv lub xeev ua haujlwm heev. Hauv qhov no, cov thev naus laus zis hloov kho qhov chaw ncaj qha txiav txim siab seb qhov kev ua ub no puas tuaj yeem siv tau zoo, zam kev pov tseg vim yog kev sib xyaw lossis kev sib sau ua ke, yog li ua kom muaj kev ua haujlwm tas mus li thiab ruaj khov.
Xaus Lus: Kev Kos Duab ntawm Kev Tswj "Kev Ua Haujlwm" hauv Lub Ntiaj Teb Microscopic
Tom qab koj tau tham txog ntau yam lawm, tej zaum koj yuav tau paub tias qhov kev ua haujlwm ntawm qhov chaw ntawmdawb fused aluminaCov hmoov me me thiab kev ua haujlwm zoo tsis yog sib npaug xwb. Nws zoo li kev ua haujlwm sib npaug uas tsim los ntawm kev ua tib zoo: nws yog qhov tsim nyog los txhawb kom muaj "kev txaus siab ua haujlwm" ntawm txhua lub khoom me me thiab, los ntawm cov txheej txheem thiab thev naus laus zis, tiv thaiv lawv kom tsis txhob poob qis lossis tsis tswj hwm vim "kev txaus siab ntau dhau." Cov khoom hmoov me me zoo heev thiab cov txheej txheem ua haujlwm zoo heev yog raws li kev nkag siab tob txog cov ntaub ntawv tshwj xeeb thiab cov hom phiaj ua haujlwm tshwj xeeb, uas cuam tshuam nrog kev tsim "kev cai" thiab kev tswj hwm ntawm cov haujlwm ntawm cov hmoov me me. Cov kev paub tau los ntawm "kev nkag siab txog kev ua haujlwm" mus rau "kev tswj hwm kev ua haujlwm" qhia meej txog kev hloov pauv ntawm kev ua haujlwm niaj hnub los ntawm "kev ua haujlwm tes ua" mus rau "kev tshawb fawb."
Lub sijhawm tom ntej koj pom ib daim iav ua haujlwm, tej zaum koj yuav xav tias ntawm qhov chaw sib ntaus sib tua me me uas tsis pom, ntau lub hmoov av dawb fused alumina micropowder koom nrog kev sib ntaus sib tua zoo thiab muaj kev txiav txim zoo nrog kev tsim "kev ua haujlwm nquag." Qhov no yog lub ntxim nyiam me me ntawm kev sib koom ua ke tob ntawm cov ntaub ntawv tshawb fawb thiab cov txheej txheem tsim khoom.